The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[10p-S221-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Sun. Mar 10, 2019 1:45 PM - 5:00 PM S221 (S221)

Toshifumi Irisawa(AIST), Ken Uchida(Univ. Tokyo)