[10p-S221-1~10] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[10p-S221-4] [INVITED] Solid-phase crystallization of Group IV semiconductor thin films:
High mobility even in polycrystalline

〇Kaoru Toko^1,2, Kenta Moto¹, Toshifumi Imajo¹, Daichi Takahara¹, Masaya Saitoh¹, Ryota Yoshimine¹, Takashi Suemasu¹ (1.Univ. of Tsukuba, 2.JST-PRESTO)

Keywords:germanium