[10p-S223-1~11] 11.5 Junction and circuit fabrication process, digital applications

[10p-S223-11] Study on fabrication process of magnetic Josephson junctions on Nb 4-layer superconductiong integrated circuits

〇Daiki Hasegawa¹, Yuto Takeshita¹, Tomohiro Kamiya¹, Kyosuke Sano¹, Masamitsu Tanaka¹, Taro Yamashita^1,2, Akira Fujimaki¹ (1.Nagoya Univ., 2.JST-PRESTO)

Keywords:superconductor, magnetic Josephson junction, SFS junction