[10p-S423-1~13] CS.7 Code-sharing Session of 7.4 & 9.5

[10p-S423-3] Analysis of X-ray Induced force changes on Ge surfaces observed by XANAM

〇Shushi Suzuki¹, Shingo Mukai², Wang-Jae Chun³, Masaharu Nomura⁴, Kiyotaka Asakura² (1.Nagoya Univ., 2.Hokkaido Univ., 3.ICU, 4.KEK-PF)

Keywords:Noncontact Atomic Force Microscopy, SR X-ray, Elemental analysis

We have developed "X-ray Aided Atomic Force Microscopy (XANAM)" as a method to identify the elements with identifying individual nanostructures at a surface/interface. We investigated X-ray induced change in the tip-surface atomic force and proposed the method of obtaining element mapping by using a sample of Au and Ni. In this report, we applied the spectroscopy measurements to a Ge semiconductor sample surface and found that more distinctive changes in the tip-surface force induced by X-ray, compared with the previous data.