2:15 PM - 2:45 PM
[10p-W933-3] Nanoscale subsurface imaging based on atomic force microscopy
Keywords:AFM, subsurface
Presentation information
Symposium (Oral)
Symposium » Nanoscale 2D/3D analyses for new device and materials development II
[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II
Sun. Mar 10, 2019 1:30 PM - 5:45 PM W933 (W933)
Yuji Matsumoto(Tohoku Univ.), Takashi Furukawa(Hitachi High-Technologies Corporation)