[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II

[10p-W933-4] Nano-scale Elasticity Evaluation Method by Ultrasonic Atomic Force Microscopy

〇Toshihiro Tsuji¹ (1.Tohoku Univ.)

Keywords:atomic force microscopy, contact resonance, ultrasonic measurement

The elasticity evaluation method based on ultrasonic measurement has been used for nondestructive inspection of structural materials and electronic devices, but it is difficult to enhance its spatial resolution up to nano scale. To solve this problem we developed ultrasonic atomic force microscopy (UAFM), where nano-scale evaluation of stiff industrial materials is realized using the effect of the resonance deflection vibration of a soft cantilever. In this presentation, the principle, analysis method, and notable results of applications are introduced.