[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II

△ [10p-W933-5] Surface termination analysis of LaAlO₃(001) substrates using ion-scattering spectroscopy

〇Jiyeon N Lee¹, Jeong Rae Kim^2,3, Junsik Mun^2,4, Yoonkoo Kim^2,4, Yeong Jae Shin^2,3, Bongju Kim^2,3, Saikat Das^2,3, Lingfei Wang^2,3, Miyoung Kim^2,4, Tae Heon Kim⁵, Tae Won Noh^2,3, Mikk Lippmaa¹ (1.ISSP, Univ. of Tokyo, 2.CCES, IBS, 3.Seoul Nat'l Univ., 4.RIAM, Seoul Nat'l Univ., 5.Univ. of Ulsan)

Keywords:oxide, substrate, ion-scattering spectroscopy

Oxide single crystal substrates with atomically smooth and chemically uniform surfaces are indispensable for constructing sharp epitaxial heterointerfaces and investigating the emergent physical phenomena. So far, LaAlO₃(001) substrate have been utilized as a structure template to epitaxially grow a variety of oxide films. However, well-established recipe for this substrate is rarely reported due to the unstable charged surfaces of LaO⁺ or AlO₂^-. Here, we report a simple recipe to realize atomically-flat and AlO₂-single-terminated LaAlO₃(001) substrate surfaces.