The 66th JSAP Spring Meeting, 2019

Presentation information

Symposium (Oral)

Symposium » Nanoscale 2D/3D analyses for new device and materials development II

[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II

Sun. Mar 10, 2019 1:30 PM - 5:45 PM W933 (W933)

Yuji Matsumoto(Tohoku Univ.), Takashi Furukawa(Hitachi High-Technologies Corporation)

4:15 PM - 4:45 PM

[10p-W933-7] 3D Atomic Imaging of Impurities Doped in Semiconductors Using Photoelectron Holography

Kazuo Tsutsui1, Tomohiro Matsushita2, Kotaro Natori1, Tatsuhiro Ogawa1, Takayuki Muro2, Yshitada Morikawa3, Takuya Hoshii1, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Kouichi Hayashi4, Fumihiko Matsui5, Toyohiko Kinoshita2 (1.Tokyo Tech, 2.JASRI, 3.Osaka Univ., 4.Nagoya Inst. Tech., 5.Inst. Molecular Science)

Keywords:photoelectron holography, impurity doping, imaging