[11a-M113-1~11] 6.2 Carbon-based thin films

[11a-M113-9] Measurement of elastic constant of highly B doped diamond using picosecond laser ultrasound spectroscopy

〇Shinichi Shikata¹, Akira Nagakubo², Ogi Hirotsugu² (1.Kwansei Gakuin Univ., 2.Osaka Univ.)

Keywords:diamond, elastic constant, B doping

B doped diamond is known to have a 17 digit change in resistivity from E 14 to E -3 Ω cm by doping. It has been applied to mechanical and electrical applications; however, its elastic properties are not well understood. We have tried to measure high concentration B doped crystal (300 ppm) by picosecond laser ultrasonic spectroscopy. (100), (110) and (111) of HPHT synthesis were used as specimen. The modulus of elasticity is 1073.8 GPa in the (100) plane, 1182.3 GPa in the (110) plane and 1219.8 GPa in the (111) plane, which are -0.093%, 0.045% and 0.086% compared to insulating substrate.