[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

▲ [11a-PA5-3] Morphological Characterization of RF Magnetron Sputtered Zinc Oxide Thin Films-Laser Assisted.

〇(M2)Edrick Abu Saidu¹, AKIO SANPEI¹, WATARU WAKAKI¹, YASUAKI HAYASHI¹ (1.KYOTO INST. OF TECH.)

Keywords:Zinc oxide, RF magnetron sputtering, Laser irradiation; morphological properties