The 66th JSAP Spring Meeting, 2019

Sessions

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Poster presentation

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)

Daisuke Ogawa(Chubu Univ.), Kazunori Shinoda(HITACHI)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

Oral presentation

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Keigo Takeda(Meijo Univ.), Haruka Suzuki(Nagoya Univ.)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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