9:30 AM - 11:30 AM
[11a-PA5-8] Droplet-Vaporization Behavior in Plasma during Plasma-assisted Mist Chemical Vapor Deposition
Keywords:ZnO, Plasma-assisted Mist CVD
Presentation information
Poster presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)