Fumihiko Hirose

→ Search for Fumihiko Hirose in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

[11a-PA5-6] RT atomic layer deposition and its application to gas barrier

〇Fumihiko Hirose¹ (1.Yamagata Univ.)