Yasuhito Tanaka

→ Search for Yasuhito Tanaka in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

12:30 PM - 12:45 PM

[12a-W641-14] Development of programmable RAS system

〇Yasuhito Tanaka^1,2, Hideo Isshiki², Shinichiro Saisho¹ (1.SHINCRON, 2.UEC)