The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

9:30 AM - 11:30 AM

[11a-PA5-3] Morphological Characterization of RF Magnetron Sputtered Zinc Oxide Thin Films-Laser Assisted.

〇(M2)Edrick Abu Saidu1, AKIO SANPEI1, WATARU WAKAKI1, YASUAKI HAYASHI1 (1.KYOTO INST. OF TECH.)

Keywords:Zinc oxide, RF magnetron sputtering, Laser irradiation; morphological properties