[11a-PB4-1~18] 15.4 III-V-group nitride crystals

[11a-PB4-4] Study on Fabrication and Evaluation of GaN thin films by RF Magnetron Sputtering

〇Toru Nakajima¹, Yuuki Saito¹, Takuya Miyamoto¹, Hiroshi Kuroda¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹, Kikuro Takemoto², Hiroyuki Uno², Naoto Kimura², Masanori Takasaki² (1.Doshisha Univ., 2.Yamanakahutech Corp.)

Keywords:Gallium Nitride, Radio Frequency Magnetron Sputtering