Preparation of orientation controlled HfO<sub>2</sub>-based ferroelectric thick film by puttering method and their electrical properties

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

Mon. Mar 11, 2019 9:00 AM - 12:00 PM W351 (W351)

Hironori Fujisawa(Univ. of Hyogo), Tomoaki Yamada(Nagoya Univ.)

9:00 AM - 9:15 AM

〇(P)Reijiro Shimura¹, Takanori Mimura¹, Takao Shimizu¹, Hiroshi Funakubo¹ (1.Tokyo Tech. SMCT)

Keywords:ferroelectric film, HfO2