[11a-W351-1~11] 6.1 強誘電体薄膜

▼ [11a-W351-6] 【Highlight】Theoretical analysis of the influence of aspect ratio and density of nanorod arrays for piezoelectric energy harvesting

〇(D)Jundong Song¹、Tomoaki Yamada^1,2、Masahito Yoshino¹、Takanori Nagasaki¹ (1.Nagoya Univ.、2.PRESTO)

キーワード：piezoelectric energy harvesting, nanorods, finite-element simulation

Piezoelectric energy harvesting has been expected to be a promising application of powering trillions of miniaturized sensors in recent years. In this study, we focused on a novel structure of aligned piezoelectric nanorods for the energy harvesting application, and evaluating the output power of this structure using finite-element method. It is shown that using rod-shaped materials will increase the piezoelectric constant d₃₃ by 33% compared with using a film with the same thickness, owing to less substrate clamping. In addition, for the case of applying normal force, the stress is easy to concentrate into nanorods. Therefore, the nanorod structure can generate an output power one or more orders of magnitude higher than films within the same volume. The results indicate that this nanorod array will play an important role in the integration with miniaturized sensors in the off-resonant mode.