[11a-W521-5~10] 17.3 Layered materials

△ [11a-W521-9] Optimization of Fabrication Conditions of MoS_2(1-x)Te_2x
by co-Sputtering and Tellurization

〇Yusuke Hibino^1,4, Seiya Ishihara^1,4, Kota Yamazaki¹, Yuya Oyanagi¹, Yusuke Hashimoto¹, Naomi Sawamoto¹, Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudoh³, Hitoshi Wakabayashi², Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Tech., 3.Gas Phase Ltd., 4.JSPS Research Fellow)

Keywords:transition metal dichalcogenide, alloy, organic precursor

Recently, layered materials, especially transition metal dichalcogenides are drawing more and more attention. One reason that drive the research forward is its tunability of physical properties. Among those property-tuning methods, we have been focusing on fabricating alloy and controlling its composition. So far, we have reported the fabrication of MoS_2(1-x)Te_2x by co-sputtering and chalcogenization. In this study, we will report the optimization of fabrication conditions of MoS_2(1-x)Te_2x alloy.