[11a-W541-1~12] 15.4 III-V-group nitride crystals

[11a-W541-2] Structural characteristics of AlGaN multiple-quantum-wells
grown on c-plane AlN/sapphire templates with macro-steps (1)

〇Kazunobu Kojima¹, Yosuke Nagasawa², Akira Hirano², Masamichi Ippommatsu², Yoshio Honda³, Hiroshi Amano^3,4,5, Isamu Akasaki⁶, Shigefusa Chichibu¹ (1.IMRAM, Tohoku Univ., 2.UV craftory, 3.IMaSS, Nagoya Univ., 4.ARC, Nagoya Univ., 5.VBL, Nagoya Univ., 6.Meijo Univ.)

Keywords:AlGaN