The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[11p-M136-1~14] 13.3 Insulator technology

Mon. Mar 11, 2019 1:15 PM - 5:15 PM M136 (H136)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo), Kiyoteru Kobayashi(Tokai Univ.)

4:00 PM - 4:15 PM

[11p-M136-10] Survey of GeO desorption at GeO2/ Ge interface

Ryuichirou Watanabe1, Kenichiro Toyoda1, Syotaro Wachi1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of agri. & Tech.)

Keywords:semiconductor