[11p-M136-1~14] 13.3 絶縁膜技術

▲ [11p-M136-11] Crystallization of GeO₂ on Ge is really triggered by GeO desorption?

〇Min Xie¹、Tomonori Nishimura¹、Takeaki Yajima¹、Akira Toriumi¹ (1.Univ. Tokyo)

キーワード：germanium, GeO2