The 66th JSAP Spring Meeting, 2019

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13 Semiconductors » 13.3 Insulator technology

[11p-M136-1~14] 13.3 Insulator technology

Mon. Mar 11, 2019 1:15 PM - 5:15 PM M136 (H136)

Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo), Kiyoteru Kobayashi(Tokai Univ.)

4:45 PM - 5:00 PM

[11p-M136-13] Fabrication and Evaluation of GeO2/Ge structure by CVD method

〇Yasuyuki Katsuno1, Amu Sato1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of agri. & Tech.)

Keywords:semiconductor