The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

11 Superconductivity » 11.4 Analog applications and their related technologies

[11p-S321-1~17] 11.4 Analog applications and their related technologies

Mon. Mar 11, 2019 1:45 PM - 6:30 PM S321 (S321)

Masato Naruse(Saitama Univ.), Akira Kawakami(NICT), Masanori Takeda(Shizuoka Univ.)

2:00 PM - 2:15 PM

[11p-S321-2] Preparation of Nb3Ge superconducting thin films

Akira Kawakami1, Hirotaka Terai1, Yoshinori Uzawa2 (1.NICT, 2.NAOJ)

Keywords:Nb3Ge, SIS

We tried to fabricate Nb3Ge superconducting thin film for constructing tuning circuit for THz SIS mixer. As a deposition method, a multi-source sputtering method which has high freedom of film composition control was adopted. Nb, Ge and Si were prepared as target materials, and composition control was carried out by controlling the each input powers. The substrate heater temperature was set to 920 °C. The deposited film thickness, the superconducting transition temperature, and the film resistivity were about 180 nm, about 21 K, and about 45 micro-ohm-cm, respectively.