[11p-W321-1~14] 13.9 Compound solar cells

[11p-W321-9] Ohmic InP/Si Heterointerfaces by Direct Semiconductor Wafer Bonding

〇Ryoichi Inoue¹, Katsuaki Tanabe¹ (1.Kyoto Univ.)

Keywords:semiconductor wafer bonding, multijunction solar cell, ohmic heterostructure

Direct-bonded ohmic InP / Si heterostructures are realized for the fabrication of lattice-mismatched multijunction solar cells and replacement of compound semiconductor substrates with silicon substrates. We have examined the dependence of electrical conductivity on bonding temperature and doping type.