[12a-M113-1~8] 15.5 Group IV crystals and alloys

[12a-M113-1] Characterization of crystalline damages near ion-implanted Ge surface
using Raman spectroscopy method

〇Hidetaka Sofue¹, Masahiro Fukuda¹, Shigehisa Shibayama¹, Osamu Nakatsuka^1,2, Shigeaki Zaima³ (1.Nagoya Univ., 2.MaSS, Nagoya Univ., 3.IIFS, Nagoya Univ.)

Keywords:germanium, ion-implant