The 66th JSAP Spring Meeting, 2019

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[12a-M113-1~8] 15.5 Group IV crystals and alloys

Tue. Mar 12, 2019 9:30 AM - 11:30 AM M113 (H113)

Kentarou Sawano(Tokyo City Univ.)

10:30 AM - 10:45 AM

△ [12a-M113-5] Evaluation of Strain Relaxation in Patterned Carbon Doped Silicon by Water Immersion Raman Spectroscopy

〇Kazutoshi Yoshioka1, Ryo Yokogawa1,2, Naomi Sawamoto1, Atsushi Ogura1 (1.Meiji University, 2.JSPS Research Fellow DC)

Keywords:Raman Spectroscopy, Carbon Doped Silicon