[12a-PA3-1~26] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[12a-PA3-19] Ga Amount Dependence of Electrical Properties for ZnO Based Conductive Films

〇Yumika Yamada¹, Rei Sugiura², Kuniki Matsubara², Yuto Ban², Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane Univ., Nat. Sci. Technol., 2.Shimane Univ., Sci. Eng.)

Keywords:Transparent conductive film, ZnO, Sputtering