9:30 AM - 11:30 AM
[12a-PA3-4] Characterization of amorphous Al2O3 thin films prepared by mist-CVD
Keywords:mist-CVD, Al2O3
Poster presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Tue. Mar 12, 2019 9:30 AM - 11:30 AM PA3 (PA)
9:30 AM - 11:30 AM
Keywords:mist-CVD, Al2O3