9:30 AM - 11:30 AM
[12a-PA3-5] Growth of β-Ga2(O1-xSx)3 Alloy Films on YSZ Substrates by Mist Chemical Vapor Deposition
Keywords:Oxide semiconductor, Gallium Oxide, Mist Chemical Vapor Deposition
Poster presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Tue. Mar 12, 2019 9:30 AM - 11:30 AM PA3 (PA)
9:30 AM - 11:30 AM
Keywords:Oxide semiconductor, Gallium Oxide, Mist Chemical Vapor Deposition