The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

9:30 AM - 11:30 AM

[12a-PB3-4] Impact of Casimir effect on miniaturization of nanodevices

〇(B)Takeru Kagawa1, Takayuki Kawahara1 (1.Tokyo University of Science)

Keywords:MEMS, quantum field theory, sensor

Current advances in the miniaturization of devices are becoming susceptible to the Casimir effect caused by the quantum field fluctuations. Therefore, we investigated the effect of a simplified model of MEMS acceleration sensor widely used (two parallel flat plates of 1 μm × 1 μm × 300 nm and a spring with a spring constant of 3.5 N / m). As a result, in the model of this time, although it is a condition of vacuum absolute zero, it was found that the influence was great when the interval between the flat plates was smaller than 30 nm.