The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

9:30 AM - 11:30 AM

[12a-PB3-5] Fabrication of micropreconcentrator using a double replica mehod

hiroki hirakawa1, Jeong-O Lee2, Sang-Seok Lee1 (1.Tottori Univ, 2.Korea Research Institute of Chemical Technology)

Keywords:microfluidic device, double replica mehod