[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-5] Fabrication of micropreconcentrator using a double replica mehod

〇hiroki hirakawa¹, Jeong-O Lee², Sang-Seok Lee¹ (1.Tottori Univ, 2.Korea Research Institute of Chemical Technology)

Keywords:microfluidic device, double replica mehod