The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[12p-W541-1~12] 15.4 III-V-group nitride crystals

Tue. Mar 12, 2019 1:30 PM - 5:00 PM W541 (W541)

Kazunobu Kojima(Tohoku Univ.), Mitsuru Funato(Kyoto Univ.)

2:15 PM - 2:30 PM

[12p-W541-3] Dependence of surface morphology of N-polar AlN on misorientation angle of sapphire substrate

Tatsuya Isono1, Tatsuya Ezaki1, Tadatoshi Ito2, Ryota Sakamoto2, Yongzhao Yao3, Yukari Ishikawa3, Narihito Okada1, Kazuyuki Tadatomo1 (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ., 2.Department of Eng.,Yamaguchi Univ., 3.Japan Fine Ceramics Center)

Keywords:AlN, MOVPE, N-polar