[12p-W541-1~12] 15.4 III-V-group nitride crystals

[12p-W541-3] Dependence of surface morphology of N-polar AlN on misorientation angle of sapphire substrate

〇Tatsuya Isono¹, Tatsuya Ezaki¹, Tadatoshi Ito², Ryota Sakamoto², Yongzhao Yao³, Yukari Ishikawa³, Narihito Okada¹, Kazuyuki Tadatomo¹ (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ., 2.Department of Eng.,Yamaguchi Univ., 3.Japan Fine Ceramics Center)

Keywords:AlN, MOVPE, N-polar