[9a-PA3-1~10] 22.1 Joint Session M "Phonon Engineering"

[9a-PA3-7] Dependence of Output Power of Planar-type Silicon Thermoelectric Generator
on the Thickness of Thermal Conducting Film

〇Shona Noguchi¹, Kohei Mesaki¹, Keisuke Shima¹, Yuya Himeda¹, Hiroki Takezawa¹, Shuhei Hirao¹, Motohiro Tomita¹, Takanobu Watanabe¹ (1.Waseda Univ.)

Keywords:Thermoelectrics, Energy Harvesting

In order to perform thermoelectric conversion, it is important to add a temperature difference. Therefore, by thickly depositing one Al electrode on the high temperature side, heating of the other low temperature side electrode is suppressed. On the other hand, if it becomes too thick, the thermal resistance increases and the high temperature side electrode can not be sufficiently heated. In this study, we investigated by experiment and simulation to clarify the optimum thickness of thermally conductive layer.