The 66th JSAP Spring Meeting, 2019

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[9a-W323-1~12] 6.4 Thin films and New materials

Sat. Mar 9, 2019 9:00 AM - 12:15 PM W323 (W323)

Satoru Kaneko(Kanagawa Industrial Tech. Center)

10:30 AM - 10:45 AM

[9a-W323-7] Synthesis of metal oxide films using two types of metal-EDTA complexes as source materials

〇Taito Kikuchi1, Atsushi Nakamura2,1, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:EDTA complexes, metal oxide films