The 66th JSAP Spring Meeting, 2019

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[9p-M113-1~8] 6.2 Carbon-based thin films

Sat. Mar 9, 2019 1:30 PM - 3:30 PM M113 (H113)

Kazuhiro Kanda(Univ. of Hyogo)

1:30 PM - 1:45 PM

[9p-M113-1] Structural evaluation of nitrogen-containing DLC thin films by neutron reflectometry

〇Naoyuki Tatsumi1, Yasuharu Ohgoe1, Noboru Miyata2, Miyazaki Tsukasa2, Toshiyuki Yaguchi1, Akihiko Homma1 (1.Tokyo Denki Univ., 2.CROSS, Neutron Science and Technology Center)

Keywords:Neutron reflectometry, DLC