[9p-PA1-1~28] 6.4 Thin films and New materials

▲ [9p-PA1-15] Epitaxial growth of CaN_xH_y thin films using reactive magnetron sputtering

〇Seoungmin Chon¹, Shigeru Kobayashi¹, Kazunori Nishio¹, Ryota Shimizu^1,2, Taro Hitosugi¹ (1.Tokyo Tech, 2.JST-PRESTO)

Keywords:Epitaxial thin film, Catalyst, Ammonia synthesis

Calcium compounds combined with nitrogen and hydrogen (CaN_xH_y) are promising catalysts for the production of ammonia, which is an important industrial chemical such as fertilizers. To precisely understand the mechanism of such catalytic reactions, it is required to prepare well-defined surfaces with smooth and highly-oriented structures. For this purpose, epitaxial thin films can provide an ideal platform. However, due to its chemical instability, there has been no report on the thin film fabrication. In this study, we introduce our approach to fabricate CaN_xH_y epitaxial thin films using reactive magnetron sputtering.