[9p-PA1-1~28] 6.4 Thin films and New materials

[9p-PA1-16] Low-Temperature Preparation of Bi-substituted Magnetic Garnet Films by means of
an Excimer-Laser assisted Metal Organic Deposition Process.

〇Masami Nishikawa¹, Masami Kawahara², Tomohiko Nakajima³, Tetsuo Tsuchiya³, Takayuki Ishibashi¹ (1.Nagaoka Univ. of Tech., 2.Kojundo Chem. Lab., 3.AIST)

Keywords:magneto opitical film, magnetic garget, excimer laser

Bi-substituted rare earth iron garnet films have been used as imaging plates to visualize magnetic fields. To visualize curved magnetic fields, which is strongly needed, it is required that the garnet film is prepared on a flexible substrate composed of organic polymers. However, it is hard to prepare the garnet film on the polymer substrate by a normal heating process to crystalize it because the heating temperature is so high that the polymer substrate is decomposed. In this work, we used an excimer-laser assisted metal organic deposition process for low-temperature preparation of the garnet films. By this process, the garnet phase was epitaxially grown on a single crystal Gd₃Ga₅O₁₂ (GGG) substrate at room temperature.