The 66th JSAP Spring Meeting, 2019

Presentation information

Print

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[9p-PA1-1~28] 6.4 Thin films and New materials

Sat. Mar 9, 2019 1:30 PM - 3:30 PM PA1 (PA)

1:30 PM - 3:30 PM

[9p-PA1-5] Process gas dependence of Fe3O4 thin films grown with reactive sputtering

〇Takuma Ito1, Hideto Yanagihara1 (1.Univ. of Tsukuba)

Keywords:thin film, sputtering, magnetite