The 66th JSAP Spring Meeting, 2019

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21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[9p-S011-1~13] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sat. Mar 9, 2019 1:45 PM - 5:15 PM S011 (South Lecture Bldg.)

Yukiharu Uraoka(NAIST), Takayoshi Oshima(Saga Univ.)

2:30 PM - 2:45 PM

[9p-S011-4] Hot-wire hydrogenation for In-Sn-Zn-O and improvement of the TFT reliability

〇Toshiki Yanagisawa1, Yuta Someya1, Kosaku Shimizu1 (1.Nihon Univ.)

Keywords:oxide semiconductors, Hot-wire hydrogenation