[9p-S223-1~12] 7.3 Micro/Nano patterning and fabrication

[9p-S223-8] Development of Organic-Inorganic Hybrid Resins for Replica Molds with High Mechanical Strength

〇Shunya Ito¹, Takahiro Nakamura¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Keywords:UV nanoimprint lithography, replica mold, organic-inorganic hybrid resin

In UV nanoimprint lithography, the fabrication of highly reliable replica resin molds with high transmittance of UV light is necessary for reducing the process cost. Because organic replica resin molds show lower mechanical strength than inorganic fused silica molds, the improvement of mechanical strength of replica resin molds is required to give the mold performances of stable critical dimension and lifetime during repeated molding and demolding processes. Here, we studied organic-inorganic hybrid resins containing silica nanoparticles for fabricating hybrid replica molds with high mechanical strength.