[9p-W323-1~17] 8.1 Plasma production and diagnostics

[9p-W323-1] Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

〇Fuminori Yamazaki¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Inst. of Technol.)

Keywords:non-equilibrium plasma, collisional radiative model, optical emission spectroscopy

Diagnostic models of the electron temperature and density are developed for low-pressure microwave discharge Ar plasma based on the collisional radiative model, and the applicability of the diagnostic models is verified by optical emission spectroscopy. The diagnostic models of the electron temperature and density are described by Ar excited levels 5p, 6p and 4s, 4p, 5s, respectively. When developing the diagnostic models, the electron energy distribution function is assumed to be a Maxwell or a Druyvesteyn one. Comparison with the probe measurement reveals that the diagnostic results of the proposed method roughly agree with those of the probe measurement.