Fuminori Yamazaki

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 6:00 PM W323 (W323)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

1:30 PM - 1:45 PM

[9p-W323-1] Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

〇Fuminori Yamazaki¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Inst. of Technol.)