[9p-W323-1~17] 8.1 Plasma production and diagnostics

[9p-W323-2] Derivation and Comparison of Electron Temperature and Density of Atmospheric-pressure Non-equilibrium Ar Plasma by Optical Emission Spectroscopy

〇Hiroshi Onishi¹, Atsushi Nezu², Hiroshi Akatsuka³ (1.Tokyo Tech, 2.Tech. Dept., 3.IIR, Tokyo Tech)

Keywords:Optical Emission Spectroscopy, Electron Temperature, Electron Density

Recently, the atmospheric-pressure non-equilibrium plasma is being applied to various fields such as industry, agriculture, medical treatment and so on. However, the measurement methods of the electron temperature and density, which are important parameters on decision of this plasma, are not established. Therefore, the objective of this study is to find these parameters of the atmospheric-pressure non-equilibrium Ar plasma measured by Optical Emission Spectroscopy (OES). In this study, the method to analyze the emission-spectrum such as line spectrum, continuum spectrum, the Stark broadening and number density of excited states are derived with various theories and compared with some discussion.