Oral presentation

[9p-W323-1~17] 8.1 Plasma production and diagnostics

Sat. Mar 9, 2019 1:30 PM - 6:00 PM W323 (W323)

Hiroshi Akatsuka(Tokyo Tech), Tsuyohito Ito(東大)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:30 PM - 1:45 PM

[9p-W323-1] Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

〇Fuminori Yamazaki¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Inst. of Technol.)

1:45 PM - 2:00 PM

[9p-W323-2] Derivation and Comparison of Electron Temperature and Density of Atmospheric-pressure Non-equilibrium Ar Plasma by Optical Emission Spectroscopy

〇Hiroshi Onishi¹, Atsushi Nezu², Hiroshi Akatsuka³ (1.Tokyo Tech, 2.Tech. Dept., 3.IIR, Tokyo Tech)

2:00 PM - 2:15 PM

[9p-W323-3] In-situ Measurements of Electron Density and Film Thickness by Curling Probe

Mizuki Hanajima¹, Keiji Nakamura¹, Hideo Sugai², 〇(B)DAISUKE OGAWA¹ (1.Chubu University, 2.Nagoya Industrial Sci. Res. Inst.)

2:15 PM - 2:30 PM

[9p-W323-4] Plasma Activated Water Produced by High Voltage DC Pulsed APPJ

〇JunSeok Oh¹, Tatsuru Shirafuji¹, Akimitsu Hatta², Masafumi Ito³ (1.Osaka City Univ., 2.Kochi Univ. Technol., 3.Meijo Univ.)

2:30 PM - 2:45 PM

[9p-W323-5] Negative ion species in open-air helium dc glow discharge with NaCl solution as an electrode

Ryohei Hosoda¹, Naoki Shirai¹, Fumiyoshi Tochikubo², 〇Koichi Sasaki¹ (1.Hokkaido Univ., 2.Tokyo Metropolitan Univ.)

2:45 PM - 3:00 PM

△ [9p-W323-6] Control of RONS generation by mixing trace O₂ additional to N₂ sheath gas flow

〇(M2)Kotaro Ogawa¹, Hideki Yajima², Hiroshi Furuta¹, Akimitsu Hatta¹ (1.Kochi Univ. Technol., 2.ORC Manufacturing.)

3:00 PM - 3:15 PM

△ [9p-W323-7] Measurement of surface tension at liquid interface interacting with spatial afterglow of an atmospheric-presssure plasma

〇(M1)Takuma Kaneko¹, Naoki Shirai¹, Koichi Sasaki¹ (1.Hokkaidou Univ.)

3:15 PM - 3:30 PM

△ [9p-W323-8] Experimental study of dual-frequency CCP characteristics

〇(M1)Akihiro Mitsuya¹, Makoto Moriyama¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya univ.)

3:45 PM - 4:00 PM

△ [9p-W323-9] Spatiotemporal Optical Measurement of Slot-excited Atmospheric-pressure Microwave Plasma

〇(M1)Yoshiki Baba¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

4:00 PM - 4:15 PM

△ [9p-W323-10] Investigation of characteristics on dual-frequency CCP using COMSOL^®

〇(D)Makato Moriyama¹, Akihiro Mituya¹, Naoya Nakahara¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

4:15 PM - 4:30 PM

[9p-W323-11] Frequency dependence of spatial structures of interaction fluctuation between plasma and nanoparticles in reactive plasma

〇KUNIHIRO KAMATAKI¹, REN ZHOU¹, HIROSHI OTOMO¹, DAISUKE YAMASHITA¹, NAHO ITAGAKI¹, KAZUNORI KOGA¹, MASAHARU SHIRATANI¹ (1.Kyushu Univ.)

4:30 PM - 4:45 PM

[9p-W323-12] 【Highlight】Development of a sheath electric field measurement method using an optically trapped fine particle in Ar plasma

〇Kentarou Tomita¹, Hiroshi Ohtomo², Kunihiro Kamataki², Naho Itagaki², Kazunori Koga², Masaharu Shiratani² (1.IGSES, Kyushu Univ., 2.Kyushu Univ.)

4:45 PM - 5:00 PM

[9p-W323-13] Accelerated Erosion Mechanism of Tungsten Cathode of DC Arc in Nitrogen Atmosphere

〇Manabu Tanaka¹, Masaki Yoshida¹, Takayuki Watanabe¹, Seiichiro Shimizu², Koji Fujii² (1.Kyushu Univ., 2.Nippon Tungsten)

5:00 PM - 5:15 PM

[9p-W323-14] Coexistence of Fullerene and Iron Ions in ECRIS and Device Improvements

〇Yushi Kato¹, Koji Onishi¹, Kouta Hamada¹, Tatsuto Takeda¹, Kazuki Okumura¹, Takayuki Omori¹ (1.Osaka Univ.)

5:15 PM - 5:30 PM

[9p-W323-15] Measurement of Plasma Parameters under Extremely Low Power Microwave Conditions for Experiments Synthesizing Iron Endohedral Fullerene in Gas Phase and Device Improvements

〇Koji Onishi¹, Kota Hamada¹, Tatsuto Takeda¹, Takayuki Omori¹, Kazuki Okumura¹, Yushi Kato¹ (1.Osaka Univ.)

5:30 PM - 5:45 PM

[9p-W323-16] Optimizations of 4-6GHz X-mode microwave injection experiment into 2.45GHz-ECR plasma

〇Kota Hamada¹, Koji Onishi¹, Tatsuto Takeda¹, Takayuki Omori¹, Kazuki Okumura¹, Yushi Kato¹ (1.Osaka Univ.)

5:45 PM - 6:00 PM

[9p-W323-17] Improvement of extractor and beam line for estimating the damage of
satellite materials by low energy Xe ion beam irradiation

〇Tatsuto Takeda¹, Koji Onishi¹, Kouta Hamada¹, Kazuki Okumura¹, Takayuki Omori¹, Yushi Kato¹ (1.Osaka Univ.)

Poster presentation

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB1 (PB)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:30 AM - 11:30 AM

[12a-PB1-1] Ion Bombardment to Insulated Surface by Applying DC Pulse Voltage to a Microwave Antenna

〇Sho Fukuda¹, Kou Udagawa¹, Haruka Suzuki¹, Yuki Tauchi², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.Kobe Steel Ltd)

9:30 AM - 11:30 AM

[12a-PB1-2] Improvement of controlling iron vapor flux by induction heating for producing iron endohedral fullerene

〇Takayuki Omori¹, Koji Onishi¹, Tatsuto Takeda¹, Kouta Hamada¹, Kazuki Okumura¹, Yushi Kato¹ (1.Osaka Univ.)

9:30 AM - 11:30 AM

[12a-PB1-3] Preliminary experiments for optimization of multipole magnetic field and position of extraction electrode on ECRIS

〇Kazuki Okumura¹, Tatsuto Takeda¹, Onisi Kouji¹, Hamada Kouta¹, Omori Takayuki¹, Kato Yushi¹ (1.osaka univ)

9:30 AM - 11:30 AM

[12a-PB1-4] Fluid analysis of an atmospheric-pressure μplasma ejected from a narrow nozzle

〇Hiroyuki Yoshiki¹, Kenji Otosaka¹, Takehiko Sato², Tomoki Nakajima², Satoshi Uehara² (1.Tsuruoka National College of Tech., 2.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-5] Delayed discharge and optical emission characteristics in high power pulsed magnetron sputtering with Ar flow control

〇(M1)Hiroshi Nishida¹, Yoshihiro Hirai¹, Yuki Nakagomi¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-6] Micro- and macro-pulse designs in high power pulsed magnetron sputtering and the optical emission spectroscopy for generated plasma

〇Yuki Nakagomi¹, Yoshihiro Hirai¹, Hiroshi Nishida¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

9:30 AM - 11:30 AM

[12a-PB1-7] Measurements of Emission Propagation Phenomena in a Low-Temperature Atmospheric-Pressure Plasma Jet

〇HIROMASA YAMADA¹, KOUTA OGIWARA¹, MAKOTO SHINOHARA¹, MIYASHITA RYO¹, KEIYA MURAISHI¹, HIDETO TANAKA¹ (1.NIT, Ngano col.)

9:30 AM - 11:30 AM

[12a-PB1-8] Measurement of Reactive Oxygen Radicals with Polyvinyl Alcohol - Potassium Iodine

〇Hiroto Matsuura¹, Yoshiki Matsui¹, Bounyang Ouanthavinsak¹, Tran Trung Nguyen¹, Jin Sakamoto¹ (1.Osaka Pref. Univ.)

9:30 AM - 11:30 AM

[12a-PB1-9] Measurement of Tetramethylsilane Plasma Properties for Si-containing DLC Coating -Gas-Flow Rate Dependence of Fundamental Plasma Properties-

〇Yuuya Ohno¹, Masayuki Nagai¹, Shun Suzuki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba Tech, 2.Meijo Univ., 3.Gifu Univ.)

Sessions

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

[9p-W323-1] Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

[9p-W323-2] Derivation and Comparison of Electron Temperature and Density of Atmospheric-pressure Non-equilibrium Ar Plasma by Optical Emission Spectroscopy

[9p-W323-3] In-situ Measurements of Electron Density and Film Thickness by Curling Probe

[9p-W323-4] Plasma Activated Water Produced by High Voltage DC Pulsed APPJ

[9p-W323-5] Negative ion species in open-air helium dc glow discharge with NaCl solution as an electrode

△ [9p-W323-6] Control of RONS generation by mixing trace O₂ additional to N₂ sheath gas flow

△ [9p-W323-7] Measurement of surface tension at liquid interface interacting with spatial afterglow of an atmospheric-presssure plasma

△ [9p-W323-8] Experimental study of dual-frequency CCP characteristics

△ [9p-W323-9] Spatiotemporal Optical Measurement of Slot-excited Atmospheric-pressure Microwave Plasma

△ [9p-W323-10] Investigation of characteristics on dual-frequency CCP using COMSOL^®

[9p-W323-11] Frequency dependence of spatial structures of interaction fluctuation between plasma and nanoparticles in reactive plasma

[9p-W323-12] 【Highlight】Development of a sheath electric field measurement method using an optically trapped fine particle in Ar plasma

[9p-W323-13] Accelerated Erosion Mechanism of Tungsten Cathode of DC Arc in Nitrogen Atmosphere

[9p-W323-14] Coexistence of Fullerene and Iron Ions in ECRIS and Device Improvements

[9p-W323-15] Measurement of Plasma Parameters under Extremely Low Power Microwave Conditions for Experiments Synthesizing Iron Endohedral Fullerene in Gas Phase and Device Improvements

[9p-W323-16] Optimizations of 4-6GHz X-mode microwave injection experiment into 2.45GHz-ECR plasma

[9p-W323-17] Improvement of extractor and beam line for estimating the damage of
satellite materials by low energy Xe ion beam irradiation

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

[12a-PB1-1] Ion Bombardment to Insulated Surface by Applying DC Pulse Voltage to a Microwave Antenna

[12a-PB1-2] Improvement of controlling iron vapor flux by induction heating for producing iron endohedral fullerene

[12a-PB1-3] Preliminary experiments for optimization of multipole magnetic field and position of extraction electrode on ECRIS

[12a-PB1-4] Fluid analysis of an atmospheric-pressure μplasma ejected from a narrow nozzle

[12a-PB1-5] Delayed discharge and optical emission characteristics in high power pulsed magnetron sputtering with Ar flow control

[12a-PB1-6] Micro- and macro-pulse designs in high power pulsed magnetron sputtering and the optical emission spectroscopy for generated plasma

[12a-PB1-7] Measurements of Emission Propagation Phenomena in a Low-Temperature Atmospheric-Pressure Plasma Jet

[12a-PB1-8] Measurement of Reactive Oxygen Radicals with Polyvinyl Alcohol - Potassium Iodine

[12a-PB1-9] Measurement of Tetramethylsilane Plasma Properties for Si-containing DLC Coating -Gas-Flow Rate Dependence of Fundamental Plasma Properties-

Authentication

Sessions

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

△ [9p-W323-6] Control of RONS generation by mixing trace O2 additional to N2 sheath gas flow

△ [9p-W323-7] Measurement of surface tension at liquid interface interacting with spatial afterglow of an atmospheric-presssure plasma

△ [9p-W323-8] Experimental study of dual-frequency CCP characteristics

△ [9p-W323-9] Spatiotemporal Optical Measurement of Slot-excited Atmospheric-pressure Microwave Plasma

△ [9p-W323-10] Investigation of characteristics on dual-frequency CCP using COMSOL®

[12a-PB1-1~9] 8.1 Plasma production and diagnostics

Authentication

△ [9p-W323-6] Control of RONS generation by mixing trace O₂ additional to N₂ sheath gas flow

△ [9p-W323-10] Investigation of characteristics on dual-frequency CCP using COMSOL^®