[12a-PB1-1~9] 8.1 Plasma production and diagnostics

[12a-PB1-4] Fluid analysis of an atmospheric-pressure μplasma ejected from a narrow nozzle

〇Hiroyuki Yoshiki¹, Kenji Otosaka¹, Takehiko Sato², Tomoki Nakajima², Satoshi Uehara² (1.Tsuruoka National College of Tech., 2.Tohoku Univ.)

Keywords:Atmospheric-pressure microplasma flow, Schlieren method, turbulence

An atmospheric-pressure non-equilibrium microplasma jet (APμPJ), which is generated by a RF excited narrow SUS gas pipe electrode of less thanφ0.5 mm, has been developed to apply to the local Si etching, the local removal of an insulator film and DLC thin films spot deposition. In this study, the visualization of the microplasma flow, in particular fluid flow analysis near a substrate, is carried out using Schlieren method.