Takayuki Kobayashi

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Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:00 AM - 11:00 AM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[10a-Z03-1~8] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM

[10a-Z03-3] Deposition of tungsten nitride films by thermal CVD using liquid source material

〇Takayuki Kobayashi¹, Masayuki Nakamura¹, Toshiaki Tatsuta¹, Shin-ichi Motoyama¹ (1.Samco)