HU LI

→ Search for HU LI in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 10, 2020 9:00 AM - 11:00 AM Z03

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[10a-Z03-1~8] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:15 AM - 10:30 AM

[10a-Z03-6] Prediction of conductivity at Si/SiO₂ interface due to impurities originating from deposition precursors

〇HU LI¹, Kouji Inagaki², Yoshitada Morikawa² (1.TEL Technology Solutions, 2.Osaka Univ.)